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Rapid Thermal Processing Induced Interfacial Diffusion and Solid Reaction in the Al2O3/ZnO Nano-Laminates Films

Hong Wang,Daogui Liao,Tianyi Yan,Wei Ren,Chenying Wang,Zhuangde Jiang,Gang Niu,Zenghui Liu,Zuo-Guang Ye,Yijun Zhang

CERAMICS INTERNATIONAL（2024）

Cited 0|Views25
Key words
Rapid thermal processing,Atomic layer deposition,Interface
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