A stretchable tactile sensor based on ALD-prepared conductive composite textile

APPLIED MATERIALS TODAY(2024)

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摘要
Smart textile with soft and breathable features has been widely explored in tactile perception. Drop casting, dip coating and printing conductive nanoparticles on textile substrate were prevailing strategies to form the active layer of smart textile, whereas, were limited by inhomogeneity and poor bond strength. Herein, a stretchable atomic layer deposition (ALD)-prepared conductive composite textile (ACCT) with anisotropic stretchability and conductivity was proposed for strain and pressure sensing. Al2O3/ZnO conductive layer was deposited on polyester textile with excellent uniformity and bonding strength. An ACCT-based strain sensor showed a large stretchability to 30 % in x direction and a giant GF of 604.09 in y direction. Besides, a trilayer ACCT-based pressure sensor exhibited outstanding performances such as a sensitivity of 10.09 kPa 1 and a response time of 33 ms. Furthermore, an "all-textile" smart glove was proposed to achieve multiple tactile perceptions. This work offers a new strategy to fabricate novel smart textiles and wearable electronics.
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关键词
Atomic layer deposition,Tactile sensor,Conductive composite textile,Stretchability
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