Design and Test of a High-Sensitivity MEMS Capacitive Resonator for Photoacoustic Gas Detection
IEEE SENSORS JOURNAL（2024）
Key words
Sensors,Optical resonators,Micromechanical devices,Electrodes,Sensitivity,Silicon,Capacitance,Acoustic sensor,capacitive resonator,gas detection,micro-electromechanical systems (MEMS),photoacoustic spectroscopy (PAS)
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined