Preparation of Large Grain Size Polysilicon Using Long-Pulse Green Laser Annealing for 3-D Integration Technology
IEEE Transactions on Electron Devices（2024）
Key words
Grain size,Crystallization,Films,Annealing,Chemical lasers,Lasers,Thin film transistors,Grain boundary,grain filter (GF),grain size,integrity,single grain,thin-film transistors (TFTs)
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