Inverse Reticle Optimization with Quantum Annealing and Hybrid Solvers
IEEE ACCESS（2024）
关键词
Annealing,Quantum annealing,Qubit,Adaptive optics,Optical imaging,Stationary state,Linear programming,Lithography,Semiconductor device manufacture,Optical devices,Inverse lithography technology,optical proximity correction,quantum annealing,quantum computing,semiconductor
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