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Global Tilt Extraction for BEOL Contact Landing Displacement Control

Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu,Chao-Yu Cheng, Christopher Liman, Boxue Chen,Zhengquan Tan,Yuan-Chieh Chiu, Chiung-Kun Huang, Ying-Hung Liang,Hong-Ji Lee,Nan-Tzu Lian

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII（2024）

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关键词
Global tilt extraction,CD-SAXS,modeless tilt measurement,contact etch,3D NAND
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