Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)(2022)

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摘要
We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062–0.524 nm) as well as extinction ratio (1–16 dB). Static power consumption is less than 16 nW. © 2022 The Author(s)
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关键词
Mach-Zehnder Interferometer,Tunable Delay,Si Photonics,Tunable Delay Line,Extinction Ratio,Static Power Consumption,Fourier Transform Infrared Spectroscopy,Optical Tomography,Photonic Integrated Circuits,Path Delay,Silicon Photonics,Switching Ratio,Passive Loss
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