Realization of cathodoluminescence in the 180 nm spectral range by suppressing thermal stress in mist chemical vapor deposition of rocksalt-structured MgZnO films

Rocksalt-structured (RS) Mg-x Zn1-x O films with x = 0.65-1.0 were grown on MgO (100) substrate using the mist CVD method. A comparative study of the RS-Mg0.92Zn0.08O films grown under slow and rapid-cooling rates apparently showed simultaneous reductions in the surface pit density, FWHM values for the X-ray diffraction peak, and defect-related cathodoluminescence (CL) for the film grown under the slow-cooling rate. CL spectra for the RS-MgxZn1-xO films grown under the slow-cooling rate eventually showed near-band-edge emission peaks in the 180-190 nm spectral range for MgO molar fraction x >= 0.92 at RT.