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Backside Power Delivery: Game Changer and Key Enabler of Advanced Logic Scaling and New STCO Opportunities

A. Veloso,B. Vermeersch,R. Chen,P. Matagne,M. Garcia Bardon,G. Eneman,K. Serbulova,O. Zografos,S. H. Chen,G. Sisto,A. Jourdain,H. Arimura,B. O’Sullivan,A. De Keersgieter,G. Hellings,E. Beyne,N. Horiguchi,J. Ryckaert

2023 International Electron Devices Meeting (IEDM)（2023）

引用 0|浏览17
关键词
Game Changer,Power Delivery,Backside Power,Contact Resistance,Potential Scale,Noise Behavior,Chains Linked,Contact Surface Area
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