Fabrication and characterization of Ti/TiN- based resistance temperature detector.

In this work, a micro-patterned thin film resistor as temperature sensor has been developed. Based on the CMOS 1μ technology flow process, the resistance temperature detector is made. It consists of thin film of titanium/titanium- nitride as resistor. This choice is due to its widespread usage in microelectronics technology and its main properties, including specific resistivity, thermal stability, and temperature coefficient of resistance. In order to evaluate the efficiency of the suggested work, two different structures have been designed. The elaborated devices were characterized and the outcomes were examined.