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Cluster Secondary Ion Emission of Silicon: an Influence of the Samples' Dimensional Features

Alexander Tolstogouzov,Mikhail N. Drozdov,Sergey F. Belykh,Gennady P. Gololobov,Alexei E. Ieshkin,Paul Mazarov,Dmitriy V. Suvorov,Dejun Fu,Vasiliy Pelenovich,Xiaomei Zeng,Wenbin Zuo

RAPID COMMUNICATIONS IN MASS SPECTROMETRY（2019）

Cited 4|Views1
Key words
Secondary Ion Mass Spectrometry,Cluster Ion,Secondary Electron Emission,Electrical Characterization
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