Reusable Ontology Generation and Matching from Simulation Models.

As simulating semiconductor manufacturing grows complex, model reuse becomes appealing since it can reduce the time incurred in developing future models. Also, considering a large network of the semiconductor supply chain, knowledge sharing can enable the efficient development of simulation models in a collaborative organization. Such necessity of reusability and interoperability of simulation models motivates this paper. We will address these challenges through ontological modeling and linking of the simulation components. The first application is generating reusable ontologies from simulation models. Another discussed application is ontology matching for knowledge sharing between simulation components and a meta-model of the semiconductor supply chain. The proposed approach succeeds in automatically transforming simulation into reusable knowledge and identifying interconnection in a semiconductor manufacturing system.