総説:読むことを薦める原子層堆積法に関する初期の出版物の一覧-”ALDの歴史に関する仮想プロジェクト”の成果
Esko Ahvenniemi,R Akbashev Andrew,Ali Saima,Bechelany Mikhael,Maria Berdova,Boyadjiev Stefan,C.C. David,Rong Chen,Mikhail Chubarov,Cremers Veronique,Devi Anjana,Drozd Viktor,Elnikova Liliya,G. Gottardi,Kestutis Grigoras,M. Dennis,Hwang Cheol Seong, Jen Shih-Hui,Kallio Tanja,Kanervo Jaana,Khmelnitskiy Ivan,Kim Do Han, L. Klibanov,Koshtyal Yury,A I Krause Outi,Jakob Kuhs,Kaerkkaenen Irina, Kaeaeriaeinen Marja-Leena, Kaeaeriaeinen Tommi,Lamagna Luca, Abdülhamit Adam,Markku Leskelae,Lipsanen Harri,Jussi Lyytinen,Malkov Anatoly, Malygin Anatoly, Mennad Abdelkader,Militzer Christian,Molarius Jyrki,Małgorzata Norek, OEzgit-Akguen Cagla, Mikhail Panov,Pedersen Henrik,Fabien Piallat,Georgi Popov,L Puurunen Riikka,Geert Rampelberg,H A Ras Robin,Rauwel Erwan,Fred Roozeboom,Sajavaara Timo,Hossein Salami,Savin Hele,Nathanaëlle Schneider,E Seidel Thomas,Sundqvist Jonas,B Suyatin Dmitry,Torndahl Tobias,van Ommen J. Ruud,Wiemer Claudia,M E Ylivaara Oili,Yurkevich Oksana Journal of Vacuum Science and Technology（2017）
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