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Comparative Study on Microwave Probes for Plasma Density Measurement by FDTD Simulations

D. W. Kim,S. J. You,B. K. Na, J. H. Kim, H. Y. Chang,Wang‐Yuhl Oh

한국진공학회 학술발표회초록집（2014）

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Key words
Plasma Diagnostics,Millimeter-Wave Applications,Particle-in-Cell Simulations,Microwave Filters,Microwave
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