Significantly enhanced bonding strength in Al2O3/HfO2 using nanolaminate interfaces

Shangtong Zhou, Xiaofan Jiang,Yi Zhong,Daquan Yu,Qijin Cheng

Surfaces and Interfaces（2024）

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摘要

•Nanolaminate structure can significantly enhance interface bonding strength.•Alternating growth does not affect the growth rate and uniformity.•Mechanical separation of Al2O3 and HfO2 at the nanoscale is demonstrated firstly.•Force field coupling is proposed for explaining the enhanced bonding strength.

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关键词

Atomic layer deposition,Al2O3/HfO2,Nanolaminate,Tensile tests,Bonding strength

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