High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry-Pérot Micro-Cavities Wavelength Modulation System

In this article, a novel optical MEMS (Micro-electromechanical System) acceleration sensor based on a metal Fabry-Pérot microcavity is investigated using the transfer matrix method and finite element analysis. The analytical calculation and simulation results show that the accelerometer has a wide measurement range, high sensitivity and resolution, good linearity, and low cross-axis sensitivity over the whole wavelength modulation range. The accelerometer has a linear measurement range of ±251 g, an optical system sensitivity of 1.9038, a mechanical sensitivity of 10.92 nm/g, a cross-axis sensitivity on the orthogonal axis as low as 0.09%, an accelerometer sensitivity up to 20.79 nm/g and a resolution of 48.10 μg (δλ = 1 pm). These functional characteristics make the proposed sensor have important application prospects in the fields of portable devices, biomedicine, and the Internet of Things, as well as autonomous driving and aerospace.