Characterization and Advanced Modeling of Dielectric Defects in Low-Thermal Budget RMG MOSFETs Using 1/f Noise Analysis
IEEE Transactions on Electron Devices（2024）
Key words
1/f noise,characterization,complemen- tary field-effect transistor (CFET),replacement metal gate (RMG),sequential 3-D
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined