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Multiple SiGe/Si Layers Epitaxy and SiGe Selective Etching for Vertically Stacked DRAM

Zhenzhen Kong,Hongxiao Lin,Hailing Wang,Yanpeng Song,Junjie Li, Xiaomeng Liu,Anyan Du,Yuanhao Miao,Yiwen Zhang,Yuhui Ren,Chen Li,Jiahan Yu,Jinbiao Liu,Jingxiong Liu, Qinzhu Zhang,Jianfeng Gao, Huihui Li, Xiangsheng Wang,Junfeng Li,Henry H. Radamson,Chao Zhao,Tianchun Ye,Guilei Wang

Journal of Semiconductors（2023）

Cited 4|Views4
Key words
RPCVD,epitaxy,SiGe/Si multilayers,L-GAAFETs,VS-DRAM
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