An Alternative Capacitive Transducer Design for Sensitivity Enhancement in MEMS Lorentz Force MagnetometersZakriya Mohammed,Daniel S. Choi,Ibrahim M. ElfadelMicrosystem Technologies(2024)引用 0|浏览3AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要