Atmospheric Pressure Plasmas Driven by Tailored Voltage WaveformsAndrew Gibson, L. Alelyani, Scott Doyle,Jérôme Bredin,Jean-Paul Booth,James Dedrick,Deborah O’Connell,Timo Gansopenalex(2017)引用 0|浏览1关键词Atmospheric Pressure Plasmas,Low Temperature Plasmas,Atomic Layer EtchingAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要