A Distributed Magnetostatic Resonator

This work reports the design, fabrication, and characterization of coupling-enhanced magnetostatic forward volume wave (MSFVW) resonators with significant spur suppression. The fabrication is based on surface micromachining of yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate with thick gold transducers. A distributed resonator is used to excite forward volume waves in YIG to realize a frequency-dependent coupling boost. Fabricated devices at 18 and 7 GHz show coupling coefficients as high as 13% and quality factors above 1000. Higher order magnetostatic mode suppression is experimentally demonstrated through a combination of transducer and YIG geometry design.