Performance and fouling characteristics in a pilot-scale reverse osmosis membrane system for microelectronic wastewater treatment

•A pilot-scale UF-RO system was constructed for treating real microelectronic wastewater.•The UF-RO system showed removal rate of > 99.5 % for tetramethylammonium hydroxide.•Inorganic, organic, and biofouling were identified on the RO membrane surface.•The 2nd stage experienced the most pronounced organic fouling in the RO system.•High concentration of toxic contaminants might inhibit development of biofouling.