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Ferroelectric Properties Tuning in Hf 0.5Zr 0.5O 2 Thin Films via Controlling the Crystal Orientations of Single-crystalline TiN Substrates

Yuyan Fan,Shunda Zhang,Yulong Dong,Danyang Chen,Jiahui Zhang,Jingquan Liu,Mengwei Si,Yanwei Cao,Xiuyan Li

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials（2023）

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