A Simulation Study of Vertical Ga <sub>2</sub>O <sub>3</sub> Schottky Barrier Diodes Using Field Plate Termination

Yohei Yuda, Kohei Ebihara,Takuma Nanjo, Masayuki Furuhashi,Tatsuro Watahiki, Kazuyasu Nishikawa

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials（2023）

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A Simulation Study of Vertical Ga &lt;sub&gt;2&lt;/sub&gt;O &lt;sub&gt;3&lt;/sub&gt; Schottky Barrier Diodes Using Field Plate Termination