High Performance Ga <sub>2</sub>O <sub>3</sub> Schottky Barrier Diode with Patterned Mg-CBL Rings Fabricated using a Damage-Free Doping Technique

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials（2023）

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High Performance Ga &lt;sub&gt;2&lt;/sub&gt;O &lt;sub&gt;3&lt;/sub&gt; Schottky Barrier Diode with Patterned Mg-CBL Rings Fabricated using a Damage-Free Doping Technique