Emission engineering in monolithically integrated silicon nitride microring resonators
ACS Materials Letters(2024)
摘要
Monolithic integration of solid-state color centers with photonic elements of
the same material is a promising approach to overcome the constraints of
fabrication complexity and coupling losses in traditional hybrid integration
approaches. A wide band-gap, low-loss silicon nitride (SiN) platform is a
mature technology, having CMOS compatibility, widely used in hybrid integrated
photonics and optoelectronics. However, it has been shown that certain growth
conditions enable the SiN material to host color centers, whose origin is
currently under investigation. In this work, we have engineered a novel
technique for the efficient coupling of these intrinsic emitters into the
whispering gallery modes (WGMs) of the SiN microring cavity – which has not
been explored previously. We have engineered a subwavelength-sized notch into
the rim of the SiN microring structure, to optimize the collection efficiency
of the cavity-coupled enhanced photoluminescence (PL) spectra at room
temperature. The platform presented in this work will enable the development of
monolithic integration of color centers with nanophotonic elements for
application to quantum photonic technologies.
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