Analogous Design of a Microlayered Silicon Oxide-Based Electrode to the General Electrode Structure for Thin-Film Lithium-Ion Batteries

Development of miniaturized thin-film lithium-ion batteries (TF-LIBs) using vacuum deposition techniques is crucial for low-scale applications, but addressing low energy density remains a challenge. In this work, structures analogous to SiOx-based thin-film electrodes are designed with close resemblance to traditional LIB slurry formulations including active material, conductive agent, and binder. The thin-film is produced using mid-frequency sputtering with a single hybrid target consisting of SiOx nanoparticles, carbon nanotubes, and polytetrafluoroethylene. The thin-film SiOx/PPFC (plasma-polymerized fluorocarbon) involves a combination of SiOx and conductive carbon within the PPFC matrix. This results in enhanced electronic conductivity and superior elasticity and hardness in comparison to a conventional pure SiOx-based thin-film. The electrochemical performance of the half-cell consisting of thin-film SiOx/PPFC demonstrates remarkable cycling stability, with a capacity retention of 74.8% up to the 1000th cycle at 0.5 C. In addition, a full cell using the LiNi0.6Co0.2Mn0.2O2 thin-film as the cathode material exhibits an exceptional initial capacity of approximate to 120 mAh g-1 at 0.1 C and cycle performance, marked by a capacity retention of 90.8% from the first cycle to the 500th cycle at a 1 C rate. This work will be a stepping stone for the AM/CB/B composite electrodes in TF-LIBs. SiOx-based thin-film electrodes are designed similar to traditional lithium-ion battery (LIB) slurry formulations, including active material, conductive agent, and binder. Using mid-frequency sputtering with a hybrid target containing SiOx nanoparticles, carbon nanotubes, and polytetrafluoroethylene, a thin-film SiOx-based composite electrode is successfully fabricated within plasma-polymerized fluorocarbon (PPFC). The SiOx/PPFC composite thin-film exhibits improved electronic conductivity, elasticity, and hardness compared to pure SiOx-based thin-film. The electrochemical performance of the SiOx/PPFC composite thin-film shows remarkable cycling stability.image