Effect of vacuum annealing on properties of HfO2/SiO2 reflective films

•Annealing method and annealing idea that can reduce the thermal effect of the film.•The effect of different annealing temperatures on the properties of thin films in a vacuum environment was studied.•Vacuum annealing can reduce the thermal effect of the film and improve the reflectivity of the HR film.•After vacuum annealing, the roughness of the film increases, and the adhesion and hydrophilicity decrease.•Provide reference data for the performance improvement of the laser film.