Orientational analysis of atomic pair correlations in nanocrystalline indium oxide thin films

Justin M. Hoffman, Niklas B. Thompson,Olaf Borkiewicz,Xiang He,Samuel Amsterdam, Zhu-lin Xie,Aaron Taggart,Karen L. Mulfort,Alex B. F. Martinson,Lin X. Chen,Uta Ruett,David M. Tiede, I. Robinson

IUCrJ（2024）

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摘要

Grazing-incidence total X-ray scattering allows for orientational pair distribution function analysis of indium oxide thin films with only a single measurement. Elucidation of information such as effects of film anisotropy on bond lengths in specific orientations relative to the substrate and determination of orientation in X-ray amorphous films is demonstrated.

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关键词

orientations,conductive thin films,atomic layer deposition,grazing-incidence diffraction,pair distribution functions,materials science,total X-ray scattering,inorganic chemistry,film anisotropy,amorphous materials

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