Nitrogen-containing diamond-like carbon deposited on glass substrate via filtered cathodic vacuum arc with high-frequency pulsed DC substrate bias

This research investigates the properties of nitrogen-containing diamond-like carbon (N-DLC) coatings deposited on glass substrate using a high-frequency pulsed-DC substrate bias. The study involved comprehensive investigations to understand how variations in carbon bonding affect the properties of N-DLC coatings. By adjusting the voltage, frequency and duty ratio of the pulsed bias, it was possible to deposit an optical coating with a transmittance of up to 52 % at range of 800-2500 nm while effectively preventing the peeling of the DLC coating on the glass. With increasing the clustered graphite structure in the DLC coating, the sheet resistance was lowered from 2370 k omega/ to 36 k omega/, and the electrical properties were also improved. The findings provide valuable insights for optimizing N-DLC coatings for non-conductors, e.g., glass, rubber, polymer, and engineering ceramic.