Atomization characteristics of 9.6 MHz directional surface acoustic wave for 1-micron spray system

SENSORS AND ACTUATORS A-PHYSICAL(2024)

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摘要
Surface acoustic wave atomization is also effective for generating microparticles and nanoparticles, because of the small wavelength with the high frequency. In this work, a novel directional surface acoustic wave (SAW) atomizer via a novel 9.6 MHz unidirectional interdigital transducer (U-IDT), a driving interdigital transducer (DIDT) and a reflector interdigital transducer (R-IDT), is proposed and studied for the 1-micron spray system, such as the pulmonary drug delivery system and high-precision film deposition system. The atomization characteristics of a water drop are evaluated with atomized droplet size, atomizing particle velocity, and atomizing rate. Around 1 mu m atomized droplet diameter, 585 mm/s atomizing particle velocity, and 4.2 ml/min atomizing rate are achieved and investigated. Based on the 1-micron atomized droplet diameter and high diffusion velocity, a novel pulmonary drug delivery system with the SAW spray can be excepted as an effective non-intrusive treatment method. It is also suitable for microparticle and nanoparticle spray without the pump and fan systems in the fields of industry, cosmetics, medicine, and medical devices.
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关键词
Ultrasonic,Surface acoustic wave,Atomization,Acoustofluidics,Respiratory dosing,Film deposition
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