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Correction: Integrated 4-Terminal Single-Contact Nanoelectromechanical Relays Implemented in a Silicon-on-insulator Foundry Process

Yingying Li,Elliott Worsey,Simon J. Bleiker,Pierre Edinger,Mukesh Kumar Kulsreshath,Qi Tang,Alain Yuji Takabayashi,Niels Quack,Peter Verheyen,Wim Bogaerts,Kristinn B. Gylfason,Dinesh Pamunuwa,Frank Niklaus

Nanoscale（2023）

Cited 2|Views25
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