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Investigation of Reflection Anisotropy Induced by Micropipe Defects on the Surface of a 4H-Sic Single Crystal Using Scanning Anisotropy Microscopy

Wei Huang,Jinling Yu,Yu Liu,Yan Peng,Lijun Wang, Ping Liang,Tangsheng Chen,Xiangang Xu,Fengqi Liu,Yonghai Chen

CHINESE PHYSICS B（2024）

Cited 1|Views24
Key words
scanning anisotropy microscopy,SiC,reflection anisotropy,edge dislocation
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