Development and optimisation of a SiO₂ PVD technique based on the thermal decomposition of PDMS

New Journal of Chemistry（2023）

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摘要

Mass and heat rate dependant deposition of SiO 2 vapour species by controlled thermal degradation of PDMS on solid substrates.

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pvd technique,pdms,thermal decomposition

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Development and optimisation of a SiO2 PVD technique based on the thermal decomposition of PDMS