Beam power scale-up in MEMS based multi-beam ion accelerators

Author(s): Ji, Q; Afridi, KK; Bauer, T; Giesbrecht, G; Hou, Y; Lal, A; Ni, D; Persaud, A; Qin, Z; Seidl, P; Sinha, S; Schenkel, T | Abstract: We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents g1 mA and ion energies g100 keV for applications in materials processing.