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Development and Analysis of Thick GaN Drift Layers on 200 Mm CTE-matched Substrate for Vertical Device Processing

Walter Gonçalez Filho,Matteo Borga,Karen Geens,Deepthi Cingu,Urmimala Chatterjee,Sourish Banerjee,Anurag Vohra, Han,Albert Minj,Herwig Hahn, Matthias Marx,Dirk Fahle,Benoit Bakeroot,Stefaan Decoutere

SCIENTIFIC REPORTS（2023）

Cited 3|Views5
Key words
Electrical and electronic engineering,Electronic devices,Science,Humanities and Social Sciences,multidisciplinary
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