Enhancing SNSPDs detection efficiency via suspended SiO₂ membrane

Superconducting nanowire single-photon detectors (SNSPDs) with high detection efficiency have played significant role in numerous applications for photon detection from visible light to mid-infrared band. However, it is still a challenge to easily promote the sensitivity of SNSPD without compromising its other performance. We report a method to improve the detection sensitivity of devices via suspended SiO2 membrane, and the intrinsic detection efficiency is significantly enhanced from 78% to 100% for a 1550nm wavelength. The electro-thermal simulation and hotspot relaxation time measurement indicate that a suspended SiO2 membrane can significantly decrease the cooling efficiency between the hotspot and the substrate, and the relaxation time is enlarged twice than before. Meanwhile, we note that the proposed method does not affect other properties of devices, such as dark count rate, detection speed, and timing jitter. Because the thermal dissipation process can be controlled continuously (by varying the size of the suspended area), the proposed method may also help to obtain a deeper understanding of the thermal diffusion and detection process of SNSPDs.