Increasing sensitivity of mass detection using nonlinear micro/nano-mechanical resonators

2023 IEEE SENSORS(2023)

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摘要
The contribution discusses possible approach(es) for detection of the mass of a (nano)particle/molecule attached to a micro/nano-mechanical resonator operating in non-linear vibrational conditions. The mass of the particle can be extracted either based upon the jump down/up frequencies or jump down/up amplitudes occurring upon the sweep over the first and/or second natural frequency of the resonator. To unambiguously identify the attached particle/ molecule on the resonator, always two parameters are essential to be measured simultaneously. Either the two (consecutive) jump down/up frequencies in non-linear regime or just the first jump down/up frequency and corresponding maximal amplitude at the same moment. The last possibility is to combine both cases leading yet to a higher sensitivity of the mass detection. The mentioned approaches have their advantages and disadvantages which are described and discusses in this contribution.
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关键词
mass spectrometry,micromechanical resonator,FEM,nonlinearity,vibrations
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