Integrated Glass Chips for XUV Radiation Generation and Manipulation

2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)(2023)

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摘要
Recent advances in Ultrafast laser technologies are boosting the development of compact ultrafast sources of coherent eXtreme UltraViolet (XUV, 10–124 eV) and Soft-X-Ray (SXR, from 124 eV up to a few keV). High order Harmonic Generation (HHG) is a well-established approach to achieving this radiation, with a duration on the attosecond timescale, by table-top ultrafast driving lasers [1].
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关键词
chemical etching,coherent eXtreme UltraViolet,compact ultrafast sources,femtosecond laser irradiation,fused silica substrates,gas density,gas microfluidics,gas-laser interaction,high order harmonic generation,hollow-core waveguides,infrared driving field,integrated glass chips,microfluidic glass devices,SiO2/sur,soft-X-ray,table-top ultrafast driving lasers,ultrafast laser technologies,ultrafast nonlinear optics,ultrafast spectroscopy,X-ray science,XUV radiation generation
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