On-chip Diode Temperature Sensors on InP-based Generic Foundry Platform

Wenjing Tian, Dylan Harmsen,Ozan Çirkinoglu, Bart Bas, Pascal Van Den Berg, Roel De Meulder,Dzmitry Pustakhod,Kevin Williams,Xaveer Leijtens

2023 Opto-Electronics and Communications Conference (OECC)（2023）

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摘要

We developed two types of diode temperature sensors on the InP-based generic foundry platform, with no process adaptations required. These sensors showed sensitivity from -1.1 to - 2.1 mV/K and were not affected by on-chip light.

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关键词

Temperature Sensors,Thermal Management,Photonic Integration.

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