Suppression of Spurious Propagation Modes on Plate Waves and SAWs Using Divided Piezoelectric Thin Plates

2023 IEEE International Ultrasonics Symposium (IUS)(2023)

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摘要
Plate waves have a high phase velocity and high coupling propagation modes. However, spurious propagation modes are also excited. A Rayleigh-type surface acoustic wave spurious response also appears in the resonance response of a Love wave-type surface acoustic wave (Love SAW) with a high coupling factor. In this study, we propose divided structures to suppress spurious responses in an SH 0 mode of the plate wave within a LiNbO 3 (LN) thin plate and Love SAW on an LN substrate. The resonance properties were analyzed using the finite element method. The results indicate that the proposed divided structure significantly suppresses the spurious response while maintaining the main response.
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关键词
plate wave,Love SAW,divided structure
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