Resonance Properties of Leaky SAW Higher Harmonics on LiTaO3 Thin Plate Bonded to Quartz Substrate

One of the approaches to achieve high-frequency operations is the utilization of high-order SAW (surface acoustic wave) harmonics. In this study, the resonance properties and temperature coefficient of frequency (TCF) of the leaky SAW (LSAW) third harmonic on the 36°YX-LiTaO3 (LT)/AT90°X-quartz (Qz) bonded structure are investigated experimentally at 1.2–1.5 GHz. It was clarified that the LSAW third harmonics on the LT/Qz measured at 1.2 GHz were comparable to those on the 36°YX-LT/AT0°X-Qz measured at 600 MHz. The measured values of TCF for the third harmonic showed larger absolute values than the simulated values.