A 3600 × 3600 large-scale ISFET sensor array for high-throughput pH sensing

This paper presents a large-scale ion-sensitive field effect transistor (ISFET) array chip for pH sensing. A 3600 × 3600-pixel ISFET sensor array and corresponding readout circuitry are designed and fabricated using a conventional 0.18-μm CMOS process flow. High-throughput pH sensing is achieved with real-time data acquisition of 26 frame per second. A pH sensitivity of 73.56 mV/pH is achieved owing to the in-pixel amplification. This high-density, CMOS compatible and cost efficient ISFET array chip has great potential to be used in applications such as semiconductor DNA detection and sequencing.