Energy-efficient variable optical attenuator on SOI with folded waveguides and heaters

Shiqi Zhang,Tongxin Yang,Xiaoran Zhu,Enge Zhang,Liuwei Chen,Zilong Liu,Xu Yang,Xiuli Fu,Lei Zhang

2023 21st International Conference on Optical Communications and Networks (ICOCN)（2023）

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摘要

We report a variable optical attenuator (VOA) on silicon-on-insulator (SOI) with folded silicon waveguides and TiW heaters to improve the thermal efficiency. The measured extinction ratio of the device is around 20.4 dB with a power consumption of 10.2 mW. The rise and fall times are 17.2 μs and 17.55 μs, respectively.

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关键词

Variable optical attenuator,MachZehnder interferometer,thermo-optic effect

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