Metamaterial integrated VOx microbolometer for dualband infrared polarization detection

2022 Conference on Lasers and Electro-Optics (CLEO)(2022)

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摘要
We designed and fabricated a metamaterial-integrated vanadium oxide microbolometer for dualband infrared polarization detection. The experimental spectral and polarization responses agree with the design. Our work paved the way towards multi-spectral infrared polarization imaging detector.
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关键词
metamaterial-integrated vanadium oxide microbolometer,dualband infrared polarization detection,multispectral infrared polarization imaging detector,VOx
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