Wafer-Scale Atomic-Layer-Deposition of Er³⁺- and Yb³⁺- Doped Gain Materials for Integrated Photonics

Andreas C. Liapis,Vincent Pelgrin,Peng Liu,Xiaoqi Cui,José M.A. Rosa, Heli Seppännen,Diao Li,Igor Reduto,Seppo Honkanen,Harri Lipsanen,Zhipei Sun

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We demonstrate highly-doped Er ³⁺ and Yb ³⁺ doped gain media on SiN waveguides by plasma-enhanced atomic layer deposition, showing great potential for integrated lasers and amplifiers.

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Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics

Wafer-Scale Atomic-Layer-Deposition of Er³⁺- and Yb³⁺- Doped Gain Materials for Integrated Photonics