Ionic Liquid-assisted Cavitation for Ultrafast Laser Micromachining

Brian K. Canfield, John N. Allman,Alexander Terekhov,Trevor M. Moeller,Lino Costa

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We study the effects of cavitation-assisted ultrafast laser micromachining under ionic liquids, rather than traditional water immersion. Ionic liquids may serve to localize damage more precisely because their low vapor pressures inhibit cavitation.

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关键词

cavitation-assisted ultrafast laser micromachining,ionic liquid-assisted cavitation,ionic liquids,traditional water immersion

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