HfO2-based Platform for High Index Contrast Visible and UV Integrated Photonics

Oscar Jaramillo, Leonardo Massai,Karan Mehta

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We study HfO 2 /Al 2 O 3 composites for high-index visible/UV photonics, exhibiting material losses of < 3.0 dB/cm and n = 1.96 at λ = 405 nm. Single-mode waveguides losses are 15.3 ± 1.9 dB/cm for λ = 405 nm (2.3 0.1 dB/cm for λ = 730 nm), likely limited by sidewall roughness scattering.

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