Wafer-level fabrication of Fabry- Pérot resonators with finesse exceeding one million

Naijun Jin,Yifan Liu,Charles A. McLemore,Yizhi Luo,David Mason,Prashanta Kharel,Scott A. Diddams,Franklyn Quinlan,Peter Rakich

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We demonstrate a wafer-level fabrication technique for high-finesse Fabry-Pérot optical resonators based on reflow and optical contact bonding. These resonators have finesse exceeding one million at 1550 nm and can be readily used as reference cavities.

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关键词

Fabry- Pérot resonators,Fabry-Pérot optical resonators,finesse exceeding one million,optical contact bonding,size 1550.0 nm,wafer-level fabrication technique

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