Low Loss Thin-Film Lithium Niobate Modulator with T-Rail Electrodes on Quartz Substrate Fabricated by Photolithography

Yongqian Tang,Heng Li,Quanan Chen,Xiangyang Dai,Qiaoyin Lu,Mingzhi Lu,Weihua Guo

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We fabricated high-performance thin-film lithium niobate modulators with T-rail electrodes through photolithography. The 10-mm-long device shows a half-wave voltage of 2.2 V, fiber-to-fiber insertion loss of 3.9 dB, 2-dB EO bandwidth of 67 GHz.

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